Product introduction

n  Zhuohai has invested thin film stress measurement ZH-FS8 by using patented technology. The equipment can accurately analyze the surface stress caused by various deposited films and substrates, and can be applied to various comprehensive stress measurement solutions according to the requirement of users. The equipment supports wafer stress measurement of various specifications from 4 inches to 12 inches.

Product features

n  Dual wavelength laser detection, compatible with different coatings

n  System integration anti-jamming design, shielding external interference

n Self developed compensation algorithm to solve the problem of test result matching between devices

n  Windows 10 system, new design of human-computer interaction, graphical output of test results

n  Software system supporting self troubleshooting

n  Support real-time data display and storage

n  Compatible with SECS protocol standard