Zhuohai technology is a driving enterprise with independent R & D technology. In order to realize the localization of core parts of metrology equipment, Zhuohai has gathered R & D forces with open attitude, established a professional and rigorous innovative R & D mechanism, and continued to strengthen independent R & D. Through the unremitting efforts of Zhuohai R & D team, we have developed a number of core modules, which has certain strategic and practical significance for promoting the localization process of core parts of measurement equipment. At present, various modules independently developed by Zhuohai have been successfully applied at the client side with stable operation.

SMIF transmission device for 8 inch equipment

Zhuohai technology has independently developed the SMIF conveyor for 8-inch equipment, so that it can directly support 8-inch SMIF cassette and realize the loading and automatic transmission of SMIF cassette.

    ■  Compact structure without additional space

    ■  Dual rail design, supporting customized development

Loadport device for 4 inch to 8 inch equipment

Zhuohai technology has developed Open loadport for 4, 6 and 8-inch equipment, which directly supports the loading and automatic transmission of 4, 6 and 8-inch Open cassette.

   n  Simple structure and high transmission efficiency

   n  Facilitate maintenance and reduce maintenance cost

Compound semiconductor pre alignment machine

Compound semiconductor pre alignment machine can effectively and accurately locate transparent wafers, translucent wafers and opaque wafers through optical fiber sensors, and support the positioning of wafers of different sizes.

   n  Support transparent wafers and a variety of compounds, such as SiC, GaAs, etc

   n  Multi model compatibility