Self-developed module
  
Current Location: Index - Self-developed module

    Zhuohai technology is a driving enterprise with independent R & D technology. In order to realize the localization of core parts of metrology equipment, Zhuohai has gathered R & D forces with open attitude, established a professional and rigorous innovative R & D mechanism, and continued to strengthen independent R & D. Through the unremitting efforts of Zhuohai R & D team, we have developed a number of core modules, which has certain strategic and practical significance for promoting the localization process of core parts of measurement equipment. At present, various modules independently developed by Zhuohai have been successfully applied at the client side with stable operation.


Solid state lasers for semiconductor devices

 

      The solid-state laser for semiconductor equipment adopts pure solid-state laser technology and frequency doubling technology, which can realize the laser output of infrared light → visible light → ultraviolet light. This laser realized the localization of the key component laser module for semiconductor measurement equipment.



Metal reflector

The metal reflector with high reflection and high temperature resistance is one of the core components in the optical system, which can focus the light of the lighting source efficiently. Optical system applied to nano defect detection equipment.



Laser assembly for fast focusing

The laser module for fast focusing can quickly determine the height of the wafer in the Z direction by emitting laser and accurately receiving PSD, and assist the E-Beam metrology equipment to quickly focus the electron beam. It is applied to a variety of E-Beam metrology equipment.

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