Zhuohai technology is a driving enterprise with independent R & D technology. In order to realize the localization of core parts of metrology equipment, Zhuohai has gathered R & D forces with open attitude, established a professional and rigorous innovative R & D mechanism, and continued to strengthen independent R & D. Through the unremitting efforts of Zhuohai R & D team, we have developed a number of core modules, which has certain strategic and practical significance for promoting the localization process of core parts of measurement equipment. At present, various modules independently developed by Zhuohai have been successfully applied at the client side with stable operation.

Ultra high precision standard resistance module

        

The ultra-high precision standard resistance module is mainly used to verify the relevant performance parameters of high-precision four probe series equipment and the accuracy of metrology equipment as the detection standard. It is applied to semiconductor resistivity detection equipment.

Field emission electron source module

The field emission electron source module uses Schottky thermal field emission structure to provide high stability and large beam electron beam for the electron microscope system. It is applied to a variety of  E-Beam metrology equipment.