Zhuohai technology is a driving enterprise with independent R & D technology. In order to realize the localization of core parts of metrology equipment, Zhuohai has gathered R & D forces with open attitude, established a professional and rigorous innovative R & D mechanism, and continued to strengthen independent R & D. Through the unremitting efforts of Zhuohai R & D team, we have developed a number of core modules, which has certain strategic and practical significance for promoting the localization process of core parts of measurement equipment. At present, various modules independently developed by Zhuohai have been successfully applied at the client side with stable operation.

Magnetic fluid seal

Under the action of uniform and stable magnetic field, the magnetic fluid sealing device transmits the rotating motion to the sealed container to achieve the purpose of vacuum sealing. It is applied to semiconductor metrology equipment that needs to build vacuum.

Special screw rod for load platform transmission

The special screw rod for the transmission of the load platform is the most commonly used transmission element. It transforms the rotary motion of the motor into the linear motion of the load platform. It has the characteristics of high precision, reversibility and high transmission efficiency. Applied to all semiconductor devices.